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    Home/ Product/ SPV-12ZIn-Line Vacuum Plasma Cleaner

    SPV-12ZIn-Line Vacuum Plasma Cleaner

    Product Comparison

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    SPV-12ZIn-Line Vacuum Plasma Cleaner

    RF online wafer vacuum cleaner for semiconductor industry, PLASMA treatment online wafer plasma treatment system

    Device parameters
    model numberSPV-12Z
    Equipment size1650*1318*1803mm(L*W*H)
    RF Power Supply Power 0-600W Frequency 13.56MHZ
    capacity12 liters (length 500*width 340*height 70mm)
    Number of rails 4*2 (divided into waiting area and processing area)
    Air configurationStandard two-way, argon/oxygen (can be customized)
    system controlIndustrial control system

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