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Home/ Product/ SPV-24MMicrowave In-Line Vacuum Plasma Cleaner

SPV-24MMicrowave In-Line Vacuum Plasma Cleaner

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SPV-24M①.png

SPV-24MMicrowave In-Line Vacuum Plasma Cleaner

Microwave in-line vacuum plasma cleaning machine specially designed for the semiconductor industry, for semiconductor chip bonding pretreatment, plastic sealing pretreatment, photoresist removal, metal bonding pretreatment. The plasma is not charged

Device parameters

model numberSPV-24M
Equipment size230813602064mm (lengthwidthheight)
microwave power supply Dual microwave power supply 2000W
capacityAbout 24L
Cleaning product range 80-280mm25-90mm (lengthwidth)
Size range of material box180-290mm28-93mm200mm (lengthwidthheight)
vacuum pumpdry pump
Air configuration Standard oxygen and argon two-way process gas (CF4 gas can be customized)
system controlIndustrial control system

Product manual.pdf Download

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Product manual.pdf Download

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