Equipped with analog communication interface, optional imported industrial grade 485 isolation chip

With high-efficiency ultra-low temperature jet direct spray gun head, the processing temperature can be lower than 40 ℃, and the plasma treatment effect is more obvious

Using imported brand PFC chips and ARM chips, it can reduce reactive power by more than 25% and realize power self-matching, with low failure rate

Support digital communication interface and analog communication interface, can be connected to MES system

RF online wafer vacuum cleaner for semiconductor industry, PLASMA treatment online wafer plasma treatment system

It is specially designed for surface modification of materials with large areas and complex shapes, and is an ideal choice for cleaning, modification and etching.