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Home/ Product/ Fully automatic dual-chamber Rapid Thermal ProcessingRTP-DTS-8

Fully automatic dual-chamber Rapid Thermal ProcessingRTP-DTS-8

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Fully automatic dual-chamber Rapid Thermal ProcessingRTP-DTS-8

RTP-DTS-12 is a dual-chamber fully automatic annealing system under protective gas. It uses infrared and visible light to heat a single Wafer or sample. It has short process time and high temperature control accuracy.

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